Materials Issues in Vacuum Microelectronics Symposium Held April 13-16, 1998, San Francisco, California, U.S.A (Materials Research Society Symposium Proceedings)

Cover of: Materials Issues in Vacuum Microelectronics |

Published by Materials Research Society .

Written in English

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Subjects:

  • Microelectronics,
  • Technology & Industrial Arts,
  • Field emission cathodes,
  • Vacuum Technology,
  • Technology,
  • Science/Mathematics,
  • Ion implantation,
  • Electronics - General,
  • Vacuum microelectronics,
  • Thin films,
  • Electronics - Microelectronics,
  • Congresses

Edition Notes

Book details

ContributionsWei Zhu (Editor), Lawrence S. Pan (Editor), Thomas E. Felter (Editor), Christopher Holland (Editor)
The Physical Object
FormatHardcover
Number of Pages207
ID Numbers
Open LibraryOL8609015M
ISBN 101558994157
ISBN 109781558994157

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